Vertically Integrated System with Microfabricated 3D Sensors and CO2 Microchannel Cooling

Integrated Microchannel Cooling for Three-Dimensional Electronic Circuit Architectures

The semiconductor community is developing three-dimensional circuits that integrate logic, memory, optoelectronic and radio-frequency devices, and microelectromechanical systems. These three-dimensional (3D) circuits pose important challenges for thermal management due to the increasing heat load per unit surface area. This paper theoretically studies 3D circuit cooling by means of an integrate...

Design and Fabrication of Vertically-Integrated CMOS Image Sensors

Technologies to fabricate integrated circuits (IC) with 3D structures are an emerging trend in IC design. They are based on vertical stacking of active components to form heterogeneous microsystems. Electronic image sensors will benefit from these technologies because they allow increased pixel-level data processing and device optimization. This paper covers general principles in the design of ...

High-Performance Microchannel Emulsification Device with Microfabricated Asymmetric Through-Holes

3D microfabricated bioreactor with capillaries.

We present in this paper the implementation of an innovative three dimensional (3D) microfabrication technology coupled with numerical simulation to enhance the mass transport in 3D cell culture. The core of this microfabrication technology is a high-resolution projection micro stereolithography (PmicroSL) using a spatial light modulator as a dynamic mask which enables a parallel fabrication of...

Optimization of Photodetector Thickness in Vertically-Integrated Image Sensors

There is an emerging interest in vertically-integrated CMOS (VI-CMOS) image sensors. This trend arises from the difficulty in achieving high SNR, high dynamic range, and high frame rate with planar technologies while maintaining small pixel sizes, since the photodetector and electronics have to share the same pixel area and use the same technology. Fabrication methods for VI-CMOS image sensors ...